Product Family

Micro-Nano Optics


From master to wafer/die replication   |   DOEs, shapers, gratings, MLAs, metalenses, AR SRG — spec to volume.


Overview

Micro-nano optics combines optical design with advanced micro- and nanofabrication, using semiconductor equipment and processes to manufacture compact optical structures.

We enable advanced micro-structured and nano-photonic devices for intelligent sensing, next-generation display, AR/VR, and emerging applications. By combining our design capabilities with advanced equipment and process resources including lithography, etching, nanoimprint, and wafer-level manufacturing, we provide engineering support from design to volume production.

Product Categories

Each category is shown with its engineering summary and representative application areas.

CategorySummaryApplication Areas
DOEs, Gratings, ShapersDiffractive optics for beam shaping, spectral sorting, and light routing. We engineer DOEs, diffusers, and gratings — including transmission, reflection, and blazed designs — with high efficiency and uniformity, compatible with VCSEL, sensor, and fiber laser sources.

Laser Processing · Medical Laser · 3D Sensing · LiDAR· Spectroscopy · WSS

Micro-Lens ArraysMicro-lens arrays have unforgiving tolerances — a few nanometers of sag error becomes measurable coupling loss. We deliver wafer-level refractive, diffractive, and hybrid MLAs with high fill factor and low roughness, consistent from wafer to wafer.

Coupling · Illumination · Display

MetalensesMetalenses promise focusing, imaging, and beam steering in a layer thinner than a hair. We treat the technology as still young — with joint design, test chips, and an honest feasibility read before any production commitment.

LiDAR · Compact Imaging · AR · Spectroscopy

Polarization OpticsWe engineer micro-polarizer arrays and nano wire-grid optics at specific pitch with extinction above 300:1 — diced, aligned, and ready for direct integration onto your image sensor.

Polarization Cameras · Machine Vision · AR/VR

AR Waveguides & NILWe engineer SRG waveguides for AR glasses and HUD systems — from NIL master design through wafer-level replication — with FOV and uniformity targets, so the prototype you approve is the product your customers actually wear. Etched SiC SRG has better performance.

AR glasses · HUD · NED optical components · Replication Tooling · WLO

MEMS OpticsWe engineer WSS-grade MEMS designs — switching, scanning, or beam-steering — and qualify every device to field reliability, with the optical budget locked in from the first design.

Network Protection · Optical Monitoring · LiDAR · 3D Sensing · WSS

Custom Nano-OpticsWe take custom nano-optics from concept through test chip to pilot transfer, matching your design to the right process — and telling you early and honestly when something cannot be built yet.

Metrology · Emerging Tech · MEMS Micro-Optics

Products

Search and filter the product types within this family.

3 products

Micro-Nano Optics · Micro-Lens Arrays

Refractive MLAs

Wafer-level refractive lens arrays with tight pitch and sag control. High fill factor and low roughness for coupling and illumination homogenization at volume cost.

View Details

Micro-Nano Optics · Micro-Lens Arrays

Diffractive MLAs

Diffractive lens arrays where refractive sags become impractical. High-efficiency multi-level designs for splitting, focusing arrays, and multi-spot generation.

View Details

Micro-Nano Optics · Micro-Lens Arrays

Hybrid MLAs (Refractive + Diffractive)

Refractive power plus diffractive correction in one element. Hybrid designs cancel aberrations that neither approach solves alone — for advanced, space-constrained systems.

View Details


Need a Micro or Nano-Structure Replicated?

From design to master to wafer-level replication — share your target pattern, and we will outline the engineering path.