Product Family
From master to wafer/die replication | DOEs, shapers, gratings, MLAs, metalenses, AR SRG — spec to volume.
Micro-nano optics combines optical design with advanced micro- and nanofabrication, using semiconductor equipment and processes to manufacture compact optical structures.
We enable advanced micro-structured and nano-photonic devices for intelligent sensing, next-generation display, AR/VR, and emerging applications. By combining our design capabilities with advanced equipment and process resources including lithography, etching, nanoimprint, and wafer-level manufacturing, we provide engineering support from design to volume production.
Each category is shown with its engineering summary and representative application areas.
| Category | Summary | Application Areas |
|---|---|---|
| DOEs, Gratings, Shapers | Diffractive optics for beam shaping, spectral sorting, and light routing. We engineer DOEs, diffusers, and gratings — including transmission, reflection, and blazed designs — with high efficiency and uniformity, compatible with VCSEL, sensor, and fiber laser sources. | Laser Processing · Medical Laser · 3D Sensing · LiDAR· Spectroscopy · WSS |
| Micro-Lens Arrays | Micro-lens arrays have unforgiving tolerances — a few nanometers of sag error becomes measurable coupling loss. We deliver wafer-level refractive, diffractive, and hybrid MLAs with high fill factor and low roughness, consistent from wafer to wafer. | Coupling · Illumination · Display |
| Metalenses | Metalenses promise focusing, imaging, and beam steering in a layer thinner than a hair. We treat the technology as still young — with joint design, test chips, and an honest feasibility read before any production commitment. | LiDAR · Compact Imaging · AR · Spectroscopy |
| Polarization Optics | We engineer micro-polarizer arrays and nano wire-grid optics at specific pitch with extinction above 300:1 — diced, aligned, and ready for direct integration onto your image sensor. | Polarization Cameras · Machine Vision · AR/VR |
| AR Waveguides & NIL | We engineer SRG waveguides for AR glasses and HUD systems — from NIL master design through wafer-level replication — with FOV and uniformity targets, so the prototype you approve is the product your customers actually wear. Etched SiC SRG has better performance. | AR glasses · HUD · NED optical components · Replication Tooling · WLO |
| MEMS Optics | We engineer WSS-grade MEMS designs — switching, scanning, or beam-steering — and qualify every device to field reliability, with the optical budget locked in from the first design. | Network Protection · Optical Monitoring · LiDAR · 3D Sensing · WSS |
| Custom Nano-Optics | We take custom nano-optics from concept through test chip to pilot transfer, matching your design to the right process — and telling you early and honestly when something cannot be built yet. | Metrology · Emerging Tech · MEMS Micro-Optics |
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Micro-Nano Optics · DOEs, Gratings, Shapers
Split one beam into a designed array of identical spots. High diffraction efficiency and tight critical-dimension control keep spot-to-spot uniformity inside your system budget.
View DetailsMicro-Nano Optics · DOEs, Gratings, Shapers
Turn a Gaussian beam into a flat, uniform top-hat. Steep edges and low ripple for micromachining, medical lasers, and illumination where hotspot damage is not an option.
View DetailsMicro-Nano Optics · DOEs, Gratings, Shapers
Full custom phase on a single element — holograms, vortex beams, and structured light. Designed to your target pattern with verified efficiency and fidelity.
View DetailsMicro-Nano Optics · DOEs, Gratings, Shapers
Controlled scatter without speckle chaos. Deterministic diffusion angle and high uniformity on glass or polymer, for 3D sensing, LiDAR illumination, and displays.
View DetailsMicro-Nano Optics · Micro-Lens Arrays
Wafer-level refractive lens arrays with tight pitch and sag control. High fill factor and low roughness for coupling and illumination homogenization at volume cost.
View DetailsMicro-Nano Optics · Micro-Lens Arrays
Diffractive lens arrays where refractive sags become impractical. High-efficiency multi-level designs for splitting, focusing arrays, and multi-spot generation.
View DetailsMicro-Nano Optics · Micro-Lens Arrays
Refractive power plus diffractive correction in one element. Hybrid designs cancel aberrations that neither approach solves alone — for advanced, space-constrained systems.
View DetailsMicro-Nano Optics · Metalenses
A lens as thin as the wafer it is made on. Sub-wavelength meta-atoms deliver focusing and imaging where bulk optics cannot fit — LiDAR, compact imaging, and sensing modules. Hybrid Metalens is refractive + metasurface.
View DetailsMicro-Nano Optics · Metalenses
Full metalens function regardless of input polarization. Symmetric meta-atom designs keep efficiency high without polarization management — simplifying your optical front end.
View DetailsMicro-Nano Optics · Metalenses
One flat optic, multiple wavelengths corrected. Chirped and multi-order designs align dual or triple bands for AR/VR, compact spectroscopy, and multi-sensor fusion.
View DetailsMicro-Nano Optics · Polarization Optics
Pixel-matched polarizer arrays that turn any sensor into a polarization camera. Wafer-level patterning with high extinction, aligned to your pixel pitch.
View DetailsMicro-Nano Optics · Polarization Optics
Nanoscale wire-grid polarization for high-power and harsh environments. Stable extinction where organic films fail — LCOS, projection, telecom, and AR/VR.
View DetailsMicro-Nano Optics · Polarization Optics
Four polarization orientations integrated directly on the sensor. 0/45/90/135° pixel patterns enable single-shot Stokes imaging for industrial and biomedical vision.
View DetailsMicro-Nano Optics · AR Waveguides & NIL
Full-color AR combiners engineered from NIL master up. Surface-relief gratings with balanced FOV, efficiency, and 9-point uniformity, handled at the design stage. SiC substrates unlock ultra-wide FOV, superior thermal management, and rainbow-artifact suppression.
View DetailsMicro-Nano Optics · AR Waveguides & NIL
Monochrome SRG combiners where simplicity wins: HUD and single-color AR. Higher efficiency and easier yield than full-color stacks, with the same master-first engineering discipline.
View DetailsMicro-Nano Optics · AR Waveguides & NIL
The master defines the yield of every replica that follows. E-beam-written masters and working stamps in quartz or silicon, with RMS accuracy documented and transferred.
View DetailsMicro-Nano Optics · AR Waveguides & NIL
Precision gratings and micro-structured substrates as components or tooling. Tight CD and aspect-ratio control for spectroscopy, WSS, and wafer-level replication.
View DetailsMicro-Nano Optics · MEMS Optics
MEMS switching with optical-grade surfaces and coatings. Low insertion loss and high cycle life for network protection, monitoring, and test applications.
View DetailsMicro-Nano Optics · MEMS Optics
Fast, precise beam steering on a chip. Resonant or quasi-static micromirrors with custom coatings and scan angles for LiDAR, projection, and medical imaging.
View DetailsMicro-Nano Optics · MEMS Optics
Dense micromirror arrays for programmable wavefront and beam control. Uniform tilt and high fill factor for WSS, adaptive optics, and spatial light modulation.
View DetailsMicro-Nano Optics · Custom Nano-Optics
Spectral filtering patterned at pixel scale. Multi-zone coating, patterning, and lift-off on a single substrate — enabling hyperspectral and multispectral imagers that bulk filters cannot build.
View DetailsMicro-Nano Optics · Custom Nano-Optics
A structured path from your design to a manufacturable part. Design review, test-chip fabrication, and pilot transfer with documented process hand-off — de-risking novel nano-optics before volume commitment.
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